Plasma and Fusion Research

Volume 14, 1206088 (2019)

Rapid Communications

Effect of a Magnetic Filter Across the Exit Hole of a Flat Oxygen Plasma Source
Norihiro KODAMA, Haruhiko HIMURA, Kingo AZUMA1), Katsuyoshi TSUMORI2) and Haruhisa NAKANO2)
Kyoto Institute of Technology, Matsugasaki, Sakyo Ward, Kyoto 606-8585, Japan
1)
University of Hyogo, Syosya, Nishi-ku, Himeji, Hyogo 671-2201, Japan
2)
National Institute for Fusion Science, Gifu 509-5292, Japan
(Received 24 January 2019 / Accepted 1 April 2019 / Published 3 June 2019)

Abstract

This study aims to develop a novel flat oxygen plasma source containing a magnetic filter. The aspect ratio of the diameter to the length of the source vessel was approximately four. A pair of small permanent magnets was inserted in a metal flange to generate the magnetic filter at the exit hole of the plasma source. Measured currentvoltage characteristics indicated that a clear decrease in the electron temperature was successfully attained across the magnetic filter, which was adequate for producing negative oxygen ions via dissociative electron attachment.

Keywords

plasma source, magnetic filter, inductively coupled plasma, dissociative electron attachment, negative oxygen ion, atomic layer deposition

DOI: 10.1585/pfr.14.1206088

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