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Properties of N-doped Diamond-like Carbon Films Prepared by the PLD Method

Shengyin LI^1,2), Weidong WU¹⁾, Xueming WANG¹⁾, Feng WANG¹⁾, Yongjian TANG¹⁾ and Weiguo SUN²⁾

1)

Research Center of Laser Fusion, Mianyang 621900, Sichuan, China

2)

Institute of Atomic and Molecular Physics, Sichuan University, Chengdu, 610065, Sichuan, China

(Received 20 November 2008 / Accepted 18 June 2009 / Published 9 September 2009)

Abstract

N-doped diamond-like carbon (DLC) films were deposited on Si substrates by pulsed laser deposition (PLD) at varying N₂ pressure. The films were characterized by Raman spectroscopy and X-ray diffraction (XRD). Spectra show that the sp² hybridized carbon content increases with increasing N₂ pressure and that the films have a mainly amorphous structure. The residual stress of the films is reduced from 31.8 to −2.2 GPa by N-doping at appropriate N₂ pressure.

Copyright (c) 2009 The Japan Society of Plasma Science and Nuclear Fusion Research

Keywords

diamond-like carbon, N-doping, pulsed laser deposition, residual stress

DOI: 10.1585/pfr.4.S1008

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This paper should be cited as follows:

Shengyin LI, Weidong WU, Xueming WANG, Feng WANG, Yongjian TANG and Weiguo SUN, Plasma Fusion Res. 4, S1008 (2009).