Plasma and Fusion Research

Volume 14, 4406120 (2019)

Regular Articles


Spatial-Structure of Fluctuation of Amount of Nanoparticles in Amplitude-Modulated VHF Discharge Reactive Plasma
Ren ZHOU, Kunihiro KAMATAKI, Hiroshi OHTOMO, Daisuke YAMASHITA, Naho ITAGAKI, Kazunori KOGA and Masaharu SHIRATANI
Department of Electronics, Kyushu University, Fukuoka 819-0395, Japan
(Received 4 January 2019 / Accepted 16 March 2019 / Published 9 September 2019)

Abstract

We have investigated spatial structure of fluctuation of amount of nanoparticles in amplitude modulated VHF discharge reactive plasma in order to understand interaction fluctuations between plasma and nanoparticles. The interaction fluctuation appeared in the whole discharge region. Especially, the strong interaction fluctuation existed at the edge region. The behaviors of time evolution of intensity of spatial structure of interaction fluctuation at the center and edge regions were different with each other. Nanoparticles at the edge region were smaller than ones in the main discharge region. It suggested that the interaction fluctuation is related to the growth of nanoparticles.


Keywords

amplitude modulation, fluctuation, reactive plasma, nanoparticle, envelope analysis

DOI: 10.1585/pfr.14.4406120


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