Plasma and Fusion Research

Volume 14, 4406115 (2019)

Regular Articles

Effects of Gas Pressure on the Size Distribution and Structure of Carbon Nanoparticles Using Ar + CH4 Multi-Hollow Discharged Plasma Chemical Vapor Deposition
Sung Hwa HWANG, Kunihiro KAMATAKI, Naho ITAGAKI, Kazunori KOGA and Masaharu SHIRATANI
Department of Electronics, Kyushu University, Fukuoka 819-0395, Japan
(Received 1 January 2019 / Accepted 1 April 2019 / Published 9 September 2019)

Abstract

Using an Ar + CH4 multi-hollow discharge plasma chemical vapor deposition (MHDPCVD) method, carbon nanoparticles (CNPs) are synthesized in a size range between 10 nm and 100 nm at gas pressures from 2 Torr to 5 Torr. The size of the nanoparticles increases from 45.42 nm3 at 2 Torr to 67.85 nm3 at 5 Torr. The size dispersion also increases. Conversely, the optical emission intensities and generation of carbon related radicals decrease with increasing pressure. The Raman measurements indicate that these CNPs are composed of polymer structures containing relatively high clustered and distorted sp2 sites.

Keywords

carbon nanoparticle, multi-hollow discharge plasma chemical vapor deposition, optical emission spectroscopy, Raman spectroscopy

DOI: 10.1585/pfr.14.4406115

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