Plasma and Fusion Research

Volume 14, 3403096 (2019)

Regular Articles

Analysis of Plasma Distribution near the Extraction Region in Negative Ion Sources with Surface and Volume Produced Negative Ions
Azusa FUKANO and Akiyoshi HATAYAMA1)
Monozukuri Department, Tokyo Metropolitan College of Industrial Technology, Higashi-Oi, Shinagawa, Tokyo 140-0011, Japan
Faculty of Science and Technology, Keio University, Hiyoshi, Kohoku-ku, Yokohama, Kanagawa 223-8522, Japan
(Received 18 December 2018 / Accepted 9 April 2019 / Published 11 July 2019)


Plasma distributions near the extraction region in a hydrogen negative ion source are investigated analytically. Where surface produced hydrogen negative ions and volume produced hydrogen negative ions are considered in addition to electrons and hydrogen positive ions. The plasma-sheath equation is derived analytically and the distributions of the electric potential and the plasma density near the extraction region are obtained by solving the plasma-sheath equation. It is shown that the region consisting of the positive ions and the negative ions more than the electrons is formed near the extraction region for a case of large production rate of the negative ions. Dependence of the plasma density on the temperature of the negative ions is also shown.


negative ion source, volume produced negative ion, surface produced negative ion, plasma-sheath equation, electric potential, plasma density

DOI: 10.1585/pfr.14.3403096


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