[Table of Contents]

Plasma and Fusion Research

Volume 3, 038 (2008)

Regular Articles

A Computational Study of the Decomposition of Carbon Tetrafluoride in Wet Argon under Electron Beam Irradiation
Susumu KATO, Isao OKUDA, Eiichi TAKAHASHI and Yuji MATSUMOTO
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8568, Japan
(Received 14 March 2008 / Accepted 4 June 2008 / Published 10 July 2008)

Abstract

In this study, a computational method of the kinetic model of carbon tetrafluoride (CF4) in wet argon gas under electron beam irradiation was developed. Using this method, the mechanism of decomposition and the optimum concentration of H2O during decomposition of CF4 was determined. It was found that 99% of 1000 ppm of CF4 of in atmospheric-pressure argon gas decomposed at an input energy density of 1 J/cm3 .

Keywords

decomposition of per-fluorocompounds, electron beam irradiation, nonthermal plasma, kinetic model

DOI: 10.1585/pfr.3.038

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This paper may be cited as follows:

Susumu KATO, Isao OKUDA, Eiichi TAKAHASHI and Yuji MATSUMOTO, Plasma Fusion Res. 3, 038 (2008).