[Table of Contents]

Plasma and Fusion Research

Volume 2, S1042 (2007)

Regular Articles

Advanced Fabrication Method of Planar Components for Plasma Diagnostics
Naoki ITO1,4), Atsushi MASE1), Yuichiro KOGI1), Noriaki SEKO2), Masao TAMADA2), Zuowei SHEN3), Lu YANG3), Calvin W. DOMIER3), Neville C. LUHMANN, Jr.3) and Eiji SAKATA4)
1)
Art, Science and Technology Center for Cooperative Research, Kyushu University, Kasuga, Fukuoka 816-8580, Japan
2)
Takasaki Advanced Radiation Research Institute, Japan Atomic Energy Agency, Takasaki, Gunma 370-1292, Japan
3)
Department of Electrical and Computer Engineering, University of California at Davis, Davis, California 95616 USA
4)
Kyushu Hitachi Maxell, Ltd, Tagawa-gun, Fukuoka 822-1296, Japan
(Received 4 December 2006 / Accepted 11 March 2007 / Published 20 November 2007)

Abstract

As the importance of plasma imaging diagnostics increases, the fabrication of high performance millimeterwave planar components becomes essential. This paper describes the development of high performance millimeter-wave planar components such as antennas and filters using a low-loss fluorine substrate. The problems to be solved are the low degree of adhesion between copper foil and the fluorine substrate and the shape of the antenna pattern. In order to solve the problems, surface treatment of fluorine films and a fabrication method using Electro Fine Forming (EF2) are utilized.

Keywords

plasma diagnostic, millimeter wave, graft polymerization, electron beam, surface treatment, peel strength, dielectric constant, adhesion, PTFE, planar antenna

DOI: 10.1585/pfr.2.S1042

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This paper may be cited as follows:

Naoki ITO, Atsushi MASE, Yuichiro KOGI, Noriaki SEKO, Masao TAMADA, Zuowei SHEN, Lu YANG, Calvin W. DOMIER, Neville C. LUHMANN, Jr. and Eiji SAKATA, Plasma Fusion Res. 2, S1042 (2007).