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High Deposition Rate of Diamond-like Carbon on Trench Bottom for Acetylene Gas at Plasma Immersion and Deposition Process

EtsuoFUJIWARA, Keiichi NISHIKAWA, Michiharu KIRINUKI, Kingo AZUMA and Mitsuyasu YATSUZUKA

Department of Electrical Engineering and Computer Sciences, Faculty of Engineering, University of Hyogo

(Received 2 August 2006 / Accepted 23 August 2006 / Published 30 October 2006)

Abstract

A bright optical emission inside a trench in a solid object was observed during a diamond-like carbon (DLC) deposition process, with the DLC deposition rate being more than two-times faster on the trench's bottom than that on the top of the trench. We found that the secondary electrons inside the trench played an important role in the higher DLC deposition rate on the trench's bottom.

Copyright (c) 2006 The Japan Society of Plasma Science and Nuclear Fusion Research

Keywords

acetylene plasma, diamond-like carbon (DLC), optical emission, plasma implantation, deposition

DOI: 10.1585/pfr.1.048

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References

• [1] J. Conrad et al., J. Appl. Phys. 62, 4591 (1987).
• [2] B.P. Wood et al., J. Vac. Sci. Technol. B12, 873 (1994).
• [3] J.N. Matossian, J. Vac. Sci. Technol. B12, 850 (1994).
• [4] Y. Oka et al., Surf. Coat. Technol. 186, 141 (2004).
• [5] Y. Oka et al., Vacuum, 73, 541 (2004).
• [6] E. Fujiwara et al., Proc. of 6th Int. Conference on Reactive Plasma P-2A-05, 401 (2006).
• [7] J.N. Matossian and R. Wei, Surf. Coat. Technol. 85, 92 (1996).
• [8] M.M. Shamin et al., J. Appl. Phys. 70, 4756 (1991).

This paper may be cited as follows:

EtsuoFUJIWARA, Keiichi NISHIKAWA, Michiharu KIRINUKI, Kingo AZUMA and Mitsuyasu YATSUZUKA, Plasma Fusion Res. 1, 048 (2006).