Plasma and Fusion Research

Volume 1, 028 (2006)

Regular Articles

Validity of Electron Temperature Measurement by Using Boltzmann Plot Method in Radio Frequency Inductive Discharge in the Atmospheric Pressure Range

Noriyasu OHNO, M. Abdur RAZZAK¹⁾, Hiroshi UKAI¹⁾, Shuichi TAKAMURA¹⁾ and Yoshihiko UESUGI²⁾

EcoTopia Science Institute, Nagoya University
1): Department of Energy Engineering and Science, Graduate School of Engineering, Nagoya University
2): Department of Electrical and Electronic Engineering, Graduate School of Natural Science, Kanazawa University

(Received 25 November 2005 / Accepted 5 April 2006 / Published 7 June 2006)

Abstract

The validity of electron temperature measurement using the Boltzmann plot method was investigated in a radio frequency (rf) inductive discharge in the atmospheric pressure range. Since the Boltzmann plot method requires local thermal equilibrium (LTE), the parameter regions of electron temperature and electron density, in which the Boltzmann plot method is applicable, were analyzed in terms of a comparison of the spontaneous emission and collisional excitation to the excited states. It is observed that in our rf-inductive plasma near the atmospheric pressure range the Boltzmann plot method does not provide an exact measurement of electron temperature because of relatively low electron density, which does not satisfy the calculation criteria. An alternative method employing a combination of the Stark broadening measurement and the Saha-Boltzmann equation was demonstrated to more accurately determine the plasma parameters (electron temperature and electron density).

Keywords

rf thermal plasma, spectroscopy, thermodynamic equilibrium, Boltzmann plot, atmospheric pressure discharge

DOI: 10.1585/pfr.1.028

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This paper may be cited as follows:

Noriyasu OHNO, M. Abdur RAZZAK, Hiroshi UKAI, Shuichi TAKAMURA and Yoshihiko UESUGI, Plasma Fusion Res. 1, 028 (2006).