Plasma and Fusion Research
Volume 1, 006 (2006)
Letters
- Department of Energy Engineering and Science, Graduate School of Engineering, Nagoya University
- 1)
- EcoTopia Science Institute, Nagoya University
Abstract
The effects of using an array of tungsten pin electrodes on the ignition dynamics of radio frequency (rf) discharges generated by inductively coupled plasma (ICP) technique at atmospheric pressure are investigated experimentally. The experimental observations reveal that the array of tungsten pin electrodes successfully enhance the initial discharges maintained by the strong electrostatic field with stable and fast ignition, which enables us to sustain efficient rf induction plasmas at atmospheric pressure range.
Keywords
inductively coupled plasma, radio frequency, tungsten electrodes, electrostatic discharge, static induction transistor
Full Text
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This paper may be cited as follows:
M. Abdur RAZZAK, Shuichi TAKAMURA and Noriyasu OHNO, Plasma Fusion Res. 1, 006 (2006).