Plasma and Fusion Research
Volume 3, 038 (2008)
Regular Articles
- National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8568, Japan
Abstract
In this study, a computational method of the kinetic model of carbon tetrafluoride (CF4) in wet argon gas under electron beam irradiation was developed. Using this method, the mechanism of decomposition and the optimum concentration of H2O during decomposition of CF4 was determined. It was found that 99% of 1000 ppm of CF4 of in atmospheric-pressure argon gas decomposed at an input energy density of 1 J/cm3 .
Keywords
decomposition of per-fluorocompounds, electron beam irradiation, nonthermal plasma, kinetic model
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This paper may be cited as follows:
Susumu KATO, Isao OKUDA, Eiichi TAKAHASHI and Yuji MATSUMOTO, Plasma Fusion Res. 3, 038 (2008).