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Nitrogen Atom Density Measurements in NAGDIS-T Using Vacuum Ultraviolet Absorption Spectroscopy

Ryosuke NISHIO, Shin KAJITA¹⁾, Hirohiko TANAKA, Koji ASAOKA, Takayoshi TSUTSUMI²⁾, Masaru HORI²⁾ and Noriyasu OHNO

Graduate School of Engineering, Nagoya University, Nagoya 464-8601, Japan

1)

Institute of Materials and Systems for Sustainability, Nagoya University, Nagoya 464-8601, Japan

2)

Center for Low-Temperature Plasma Sciences, Nagoya University, Nagoya 464-8601, Japan

(Received 7 December 2021 / Accepted 23 December 2021 / Published 21 January 2022)

Abstract

For the development of a high nitrogen atom density source, we produced nitrogen plasmas and measured the nitrogen atom density using vacuum ultraviolet absorption spectroscopy (VUVAS) at high neutral gas pressure (>1.5 mTorr) and discharge power (>500 W) in the NAGDIS-T, which could generate spiral-shaped dissociative recombining plasmas. It was seen that the nitrogen atom density increases with increasing neutral gas pressure and discharge power, and it reached 6.2 × 10¹⁷ m⁻³. In the low gas pressure case, the estimated atom density was confirmed to be consistent with that measured by the actinometry method.

Copyright (c) 2022 The Japan Society of Plasma Science and Nuclear Fusion Research

Keywords

nitrogen atom, plasma, NAGDIS-T, vacuum ultraviolet absorption spectroscopy, actinometry

DOI: 10.1585/pfr.17.1201004

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