Plasma and Fusion Research

Volume 16, 1306102 (2021)

Letters

Design and Development of Plasma Window Using Microhollow Cathode Discharge
Hikaru NAKAMURA and Masayuki WATANABE1)
Graduate School of Quantum Science and Technology, Nihon University, Kanda-surugadai, Tokyo 101-8308, Japan
1)
Institute of Quantum Science, Nihon University, Kanda-surugadai, Tokyo 101-8308, Japan
(Received 5 October 2021 / Accepted 18 October 2021 / Published 25 November 2021)

Abstract

A plasma window is an atmosphere-vacuum interface, formed by the interaction of the ideal gas pressure effect and dynamic viscosity effect of plasma. The application of a plasma window is the generation of a pressure difference between 1 and 7 × 103 Pa without a large exhaust system. In this study, we designed an apparatus with a microhollow cathode discharge for plasma window generation. A resulting pressure difference between 0.889 and 8 × 103 Pa and a pressure ratio of approximately 104 were obtained.

Keywords

plasma window, atmosphere-vacuum interface, microhollow cathode, glow discharge, atmospheric pressure discharge

DOI: 10.1585/pfr.16.1306102

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