Plasma and Fusion Research

Volume 15, 2401040 (2020)

Regular Articles

Development and Evaluation of Ion Energy Analyzer for Energetic Ion Measurement in a Linear Plasma Device NUMBER
Ryosuke OCHIAI, Atsushi OKAMOTO, Takaaki FUJITA, Hideki ARIMOTO, Hiroki HACHIKUBO, Minami SUGIMOTO and Kento IIZUKA
Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan
(Received 6 January 2020 / Accepted 26 March 2020 / Published 2 July 2020)

Abstract

In order to directly measure high energy ions in a plasma and to establish a new energetic-ion-production method, we have developed an ion energy analyzer for measuring the ion energy distribution. The analyzer is a retarding potential analyzer consisting of three grids and a collector. By applying a voltage to each grid, the electrons are retarded and the ions are separated by energy. In the measurement of the plasma with the electron density of higher than 1017 m−3, it was found that the collector current was smaller than that deduced from the geometrical transparency of the grids. Measurement of the current flowing into each grid and a particle-in-cell simulation revealed that collector current decreased due to space charge between the 2nd and 3rd grids.

Keywords

energetic ion, high density magnetized plasma, linear plasma device, retarding potential analyzer, space charge effect

DOI: 10.1585/pfr.15.2401040

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