Plasma and Fusion Research

Volume 15, 1401005 (2020)

Regular Articles

Sheet Plasma Excitation by a 2.45 GHz Microwave Power Introduced through a Local Gas Injection Type Dielectric Window
Arnold Rey B. GINES and Motoi WADA
Graduate School of Science and Engineering, Doshisha University, Kyotanabe, Kyoto 610-0394, Japan
(Received 11 June 2019 / Accepted 27 January 2020 / Published 13 March 2020)

Abstract

A 2.45 GHz microwave power injected through a quartz glass window produced a stable sheet-shaped plasma with the 11 cm wide and 4 cm high rectangular cross section in a static linear magnetic field. A thin slot gas conduit opened near the surface of the window supplied a discharge gas forming a stream of neutral atoms that intersected perpendicularly the plasma flowing toward the window along the magnetic field. The gas stream caused the change of the luminous intensity distribution of the plasma around the microwave window indicating reduction of the local plasma heat load. The window did not show any damage for a continuous operation of plasma up to 2 kW microwave input power.

Keywords

magnetized plasma, microwave sheet plasma, plasma luminosity, local gas injection

DOI: 10.1585/pfr.15.1401005

Full Text

PDF format (1.4Mbytes) PDF Download

References

  • [1] I.A. Krinberg, Tech. Phys. Lett. 29 (6), 504 (2003).
  • [2] E. Hashemi, K. Niayesh and H. Mohseni, Turk. J. Elec. & Comp. Sci. 24, 4957 (2016).
  • [3] M. Galonska, R. Hollinger, I.A. Krinberg and P. Spaedtke, IEEE Trans. Plasma Sci. 33 (5), 1542 (2005).
  • [4] H.J. Woo, K.S. Chung, M.J. Lee and T. Lho, Phys. Plasmas 16, 023505 (2009).
  • [5] M. Yoshida and K. Kajinishi, IEEE Trans. Plasma Sci. 31, 40 (2003).
  • [6] A.R.B. Gines and M. Wada, Plasma Fusion Res. 14, 3401085 (2019).
  • [7] O. Tarvainen et al., Plasma Sources Sci. Technol. 23, 025020 (2014).
  • [8] A.T.T. Mostako et al., IEEE Trans. Plasma Sci. 44 (1), 7 (2016).
  • [9] S.F. Yoon et al., Vacuum 61, 29 (2001).
  • [10] C.A. Outten, J.C. Barbour and W.R. Wampler, J. Vac. Sci. Technol. A 9 (3), 717 (1991).
  • [11] C. Moon, S. Tamura, T. Kaneko and R. Hakakeyama, J. Plasma Fusion Res. 9, 436 (2010).
  • [12] N. Ohno, N. Ezumi, S. Takamura, S.I. Krasheninnikov and A.Y. Pigarov, Phys. Rev. Lett. 81, 818 (1998).