Plasma and Fusion Research
Volume 13, 3406070 (2018)
Regular Articles
- Graduate School of Engineering, Kyoto University, Katsura, Kyoto 615-8540, Japan
- 1)
- Graduate School of Engineering, Hiroshima University, 1-4-1 Kagamiyama, Higashi-Hiroshima, Hiroshima 739-8527, Japan
Abstract
We apply laser absorption spectroscopy to direct-current hollow-cathode helium plasma generated in a 0.3-mm-diameter cylindrical hole at gas pressures of 10 - 80 kPa. The measured transitions are 23S-23P and 21P-31D. We evaluate the helium metastable 23S density and gas temperature using the former transition and the 21P atom density and electric field strength from the latter one. The observed lateral distributions of the 23S and 21P atom densities depend on the gas pressure, which results from the sheath length estimated based on the spatial distribution of the evaluated electric field strength.
Keywords
microhollow cathode discharges, laser absorption spectroscopy, helium metastable
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