Plasma and Fusion Research

Volume 11, 2405120 (2016)

Regular Articles

The Effect of Thermal History on Microstructure of Er2O3 Coating Layer Prepared by MOCVD Process
Masaki TANAKA, Makoto TAKEZAWA, Yoshimitsu HISHINUMA1), Teruya TANAKA1), Takeo MUROGA1), Susumu IKENO2), Seungwon LEE3) and Kenji MATSUDA3)
Graduate School of Science and Engineering for Education, University of Toyama, Toyama 930-0855, Japan
National Institute for Fusion Science, Toki 509-5292, Japan
Hokuriku Polytechnic College, Uozu 937-0856, Japan
Graduate School of Science and Engineering for Research, University of Toyama, Toyama 930-0855, Japan
(Received 30 November 2015 / Accepted 27 September 2016 / Published 25 November 2016)


Er2O3 is a high potential candidate material for tritium permeation barrier and electrical insulator coating for advanced breeding blanket systems with liquid metal or molten-salt types. Recently, Hishinuma et al. reported to form homogeneous Er2O3 coating layer on the inner surface of metal pipe using Metal Organic Chemical Vapor Deposition (MOCVD) process. In this study, the influence of thermal history on microstructure of Er2O3 coating layer on stainless steel 316 (SUS 316) substrate by MOCVD process was investigated using SEM, TEM and XRD. The ring and net shape selected-area electron diffraction (SAED) patterns of Er2O3 coating were obtained each SUS substrates, revealed that homogeneous Er2O3 coating had been formed on SUS substrate diffraction patterns. Close inspection of SEM images of the surface on the Er2O3 coating before and after thermal cycling up to 700 °C in argon atmosphere, it is confirmed that the Er2O3 particles were refined by thermal history. The column-like Er2O3 grains were promoted to change to granular structure by thermal history. From the cross-sectional plane of TEM observations, the formation of interlayer between Er2O3 coating and SUS substrate was also confirmed.


Er2O3, thermal history, MOCVD process, SEM, TEM

DOI: 10.1585/pfr.11.2405120


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