Plasma and Fusion Research

Volume 4, S1008 (2009)

Rapid Communications

Properties of N-doped Diamond-like Carbon Films Prepared by the PLD Method
Shengyin LI1,2), Weidong WU1), Xueming WANG1), Feng WANG1), Yongjian TANG1) and Weiguo SUN2)
1)
Research Center of Laser Fusion, Mianyang 621900, Sichuan, China
2)
Institute of Atomic and Molecular Physics, Sichuan University, Chengdu, 610065, Sichuan, China
(Received 20 November 2008 / Accepted 18 June 2009 / Published 9 September 2009)

Abstract

N-doped diamond-like carbon (DLC) films were deposited on Si substrates by pulsed laser deposition (PLD) at varying N2 pressure. The films were characterized by Raman spectroscopy and X-ray diffraction (XRD). Spectra show that the sp2 hybridized carbon content increases with increasing N2 pressure and that the films have a mainly amorphous structure. The residual stress of the films is reduced from 31.8 to −2.2 GPa by N-doping at appropriate N2 pressure.

Keywords

diamond-like carbon, N-doping, pulsed laser deposition, residual stress

DOI: 10.1585/pfr.4.S1008

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This paper should be cited as follows:

Shengyin LI, Weidong WU, Xueming WANG, Feng WANG, Yongjian TANG and Weiguo SUN, Plasma Fusion Res. 4, S1008 (2009).