[Table of Contents]

Plasma and Fusion Research

Volume 1, 006 (2006)


Fast Initiation and Mode Transition of Radio Frequency Induction Plasmas at Atmospheric Pressure Using Tungsten Pin Electrodes Array
M. Abdur RAZZAK, Shuichi TAKAMURA and Noriyasu OHNO1)
Department of Energy Engineering and Science, Graduate School of Engineering, Nagoya University
EcoTopia Science Institute, Nagoya University
(Received 6 December 2005 / Accepted 21 December 2005 / Published 31 January 2006)


The effects of using an array of tungsten pin electrodes on the ignition dynamics of radio frequency (rf) discharges generated by inductively coupled plasma (ICP) technique at atmospheric pressure are investigated experimentally. The experimental observations reveal that the array of tungsten pin electrodes successfully enhance the initial discharges maintained by the strong electrostatic field with stable and fast ignition, which enables us to sustain efficient rf induction plasmas at atmospheric pressure range.


inductively coupled plasma, radio frequency, tungsten electrodes, electrostatic discharge, static induction transistor

DOI: 10.1585/pfr.1.006


  • [1] M.I Boulos, P. Fauchais and E. Phender, Thermal Plasmas: Fundamentals and Applications (Plenum press, New York, 1994).
  • [2] J. Reece Roth, Industrial Plasma Engineering Volume 1: Principles (Institute of Physics Publishing, Bristol, 1995).
  • [3] M. Amakawa, K. Adachi and S. Yasui, Trans. IEE, Japan 119A, 357 (1999). in Japanese
  • [4] M. Sakano and M. Tanaka, J. Plasma Fusion Res. 76, 748 (2000). in Japanese
  • [5] E.L. Quiros, Brazilian, J. Phys. 34, 1587 (2004).
  • [6] M.A. Razzak, S. Takamura and Y. Uesugi, IEEE Trans. Plasma Sci. 33, 284 (2005).
  • [7] M.A. Razzak, K. Kondo, Y. Uesugi, N. Ohno and S. Takamura, J. Appl. Phys. 95, 427 (2004).
  • [8] M.A. Razzak, S. Takamura and Y. Uesugi, J. Appl. Phys. 96, 4771 (2004).

This paper may be cited as follows:

M. Abdur RAZZAK, Shuichi TAKAMURA and Noriyasu OHNO, Plasma Fusion Res. 1, 006 (2006).